Product Introduction
The Avantgarde Room Temperature Electromagnet Probe Stage not only performs the tests that can be done with a permanent magnet probe stage, but also provides a variable magnetic field for sample testing with a stronger magnetic field and a larger magnetic field uniformity zone. This probe stage is designed specifically for experiments that require continuous magnetic field variations during measurements and non-destructive testing of chips, wafers and devices at room temperature.
PSEM series room temperature electromagnet probe stage is a probe stage developed specifically for room temperature variable magnetic field electrical measurement environment, providing ± 0.6T vertical magnetic field or ± 0.3T horizontal magnetic field, capable of 2 inch, 4 inch wafer repeatability, standard electrical experiments, external different test equipment can be completed on the device's electrical characteristics of the measurement, parametric measurements, DC measurements, RF measurements and Hall measurements.
Features
- The sample holder can hold up to 4-inch wafer samples. By moving the slide under the sample holder, it can realize ±50mm travel in X-Y axis, and the sample holder itself can be finely adjusted in three dimensions, which makes the sample test and sample change more convenient.
- The base of the probe arm is fixed with magnets, allowing the probe to be adjusted in three dimensions, X-Y-Z, and with the sample holder's shift adjustment, the probe can be quickly inserted into any position up to 4 inches of the sample (up to 6 probe arms can be mounted, and up to 4 probe stations can be mounted with a horizontal magnetic field electromagnet).
- Probe arms are equipped with triaxial cables and triaxial connectors for low leakage current within 100 fA, and built-in cables to avoid messy wiring.
- The probe is fixed by needle sleeve, only the tip of the needle is exposed, reducing the leakage of electricity.
- Electromagnet bracket and probe stage adopt separate isolation bracket to avoid vibration transmission to the sample when the magnet is moving.
- Sample fixing method adopts porous partition adsorption, there are three individually controlled gas adsorption channels in the outer ring, inner ring and the middle, and the minimum adsorption fixing can be 1mm*1mm samples.
- The maximum magnification of CCD is 180 times, and the maximum working distance is 100mm.
